9510 Remote Airborne Particle Counter
Particles Plus Remote Particle Counters

Model 9510
0.5 – 25.0 µm @ 1.0 CFM
Particles Plus® 9510 remote series particle counters monitor particle sizes ranging from 0.5 to 25 μm across six user-selectable channels at a flow rate of 1.0 CFM (28.3 LPM). These instruments are designed for collecting particle data in cleanrooms or other controlled environments, and seamlessly integrate with Particles Plus® Software, facility monitoring systems, or local data collection platforms.
The 9510 supports data reporting in standard cleanroom formats or as mass concentration in μg/m³, with density and refractive index corrections. Optional temperature and relative humidity probes allow integration of three key data points into a single monitoring location.
Standardized hardware and firmware across the Particles Plus® product line streamline maintenance and lower the total cost of ownership. With extensive remote diagnostics and a lifetime warranty, the 9510 delivers reliable performance and long-term value.
• Measures 0.5 μm to 25 μm |
• 1.0 CFM (28.3 LPM) flow rate |
• Long-life laser diode technology for reliable performance |
• Measures up to 30 user-selectable particle size channels |
• Internal critical orifice provides precise airflow control for consistent measurements |
• Accurate in high concentration environments with minimal time to zero-count |
• Troubleshoot issues remotely from anywhere with an internet connection |
• Stores up to 65,000 sample records, 1,000 locations, and 50 sampling recipes |
• (Optional) temperature and relative humidity probe available |
• Connect via Modbus RTU/ASCII over isolated RS-485, TCP/IP, PoE, or WiFi |
• Complies with ISO 21501-4 and JIS B9921 standards |
• Easy to clean, lightweight stainless steel enclosure with minimal particle traps |
• Included mounting bracket |
• User configurable alarm light and LED indicators for real-time alerts |
• Seamless integration into a facility monitoring system |
• 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
Model | 9510 |
---|---|
Size Range | 0.5 μm to 25 μm |
Size Channels | Factory calibrated at 0.5, 1.0, 2.5, 5.0, 10.0 μm |
Number of Channels | 6 channels (up to 30 optional) |
Counting Efficiency | 50% @ 0.5μm; 100% for particles > 0.75 μm per JIS |
Flow Rate | 1.0 CFM (28.3 LPM) |
Concentration Limits | 1,500,000 particles/ft3 @ 10% coincidence (per ISO 21501-4), |
3,000,000 particles/ft3 @ 10% coincidence (as tested and validated1) | |
Light Source | Long life laser diode |
Zero Count | < 1 count / 5 minutes (< 1 particles / 15ft3). No fault count subtraction. |
Alarms | Channel alarms on Raw counts, concentrations or mass (alarms on environmental sensors optional) |
Calibration | NIST traceable |
Vacuum Requirements | External vacuum > 15” (38.1cm) of Hg |
Airflow | Internally monitored |
Configuration/Download | USB mini-B |
Alarm | Alarm LED ring |
Communication Modes | MODBUS™ RTU or ASCII outputs (over isolated RS-485) |
Standards | ISO 21501-4 and JIS B9921 |
Instrument Calibration | Recommended minimum once per year |
External Surface | Stainless steel |
Dimensions (L x W x H) | 3.59” x 1.83” x 5.01” (9.1 cm x 4.6 cm x 12.7 cm) including probes and connectors |
Weight | 1.08 lb. (494 grams) |
Accessories | Wiring Connector, operating manual on USB flash drive |
Optional Accessories | Power Supply, Remote Mounting Bracket, Stainless Steel Barbed Isoprobe (1.0 CFM/28.3 LPM), Purge Filter Assembly, and Sample & Vacuum Tubing |
Buffer Memory | 65,000 sample records (rotating buffer) including particle count data and environmental data |
Sample Time | 1 second to 99 hours |
Power | 9 - 24 VDC (< 1.5 watts) |
Operating Conditions | 41-104ºF (5-40ºC) / 20% to 95% non-condensing |
Storage Conditions | 32-122ºF (0-50ºC) / Up to 98% non-condensing |
Warranty | 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
1- Validated by independent analysis see paper available at www.particlesplus.com/aac2022_paper
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Part Number: AS-99081 | (28.3 LPM) Part Number: AS-99041A | 100-240 VAC 50/60Hz Part Number: EE-80148 | (28.3 LPM) Stainless Steel Part Number: PS-12144 |
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Part Number: AS-99019 | Part Number: AS-99037 | Part Number: AS-99078 | Part Number: AS-99088A |
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User Manual and PPD-9K Software (USB Key) Part Number: MN-24026 | User Manual (Printed) Part Number: MN-24026P | Manual Part Number: MN-24032 | |