9510-X Remote Airborne Particle Counter
Particles Plus Remote Particle Counters
Model 9510-X Remote Airborne
Particle Counter
0.5 – 25.0 µm @ 1.0 CFM
Particles Plus® 9510 remote series particle counters monitor particle sizes ranging from 0.5 to 25 μm across six user-selectable channels at a flow rate of 1.0 CFM (28.3 LPM). These instruments are designed for collecting particle data in cleanrooms or other controlled environments, and seamlessly integrate with Particles Plus® Software, facility monitoring systems, or local data collection platforms.
The 9510 supports data reporting in standard cleanroom formats or as mass concentration in μg/m³, with density and refractive index corrections. Optional temperature and relative humidity probes allow integration of three key data points into a single monitoring location.
Standardized hardware and firmware across the Particles Plus® product line streamline maintenance and lower the total cost of ownership. With extensive remote diagnostics and a lifetime warranty, the 9510 delivers reliable performance and long-term value.
| • 1.0 CFM (28.3 LPM) flow rate |
| • Long-life laser diode technology for reliable performance |
| • Measures up to 30 user-selectable particle size channels |
| • Internal critical orifice provides precise airflow control for consistent measurements |
| • Accurate in high concentration environments with minimal time to zero-count |
| • Troubleshoot issues remotely from anywhere with an internet connection |
| • Stores up to 65,000 sample records, 1,000 locations, and 50 sampling recipes |
| • Optional temperature and relative humidity probe available |
| • Connect via MODBUS™ RTU or MODBUS™ ASCII over isolated RS-485, or MODBUS™ TCP over Wired, PoE, or WiFi |
| • Complies with ISO 21501-4 and JIS B9921 standards |
| • Easy to clean, lightweight stainless steel enclosure with minimal particle traps |
| • Included mounting bracket |
| • User configurable alarm light and LED indicators for real-time alerts |
| • Seamless integration into a facility monitoring system |
| • 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
| Model | 9510 |
|---|---|
| Size Range | 0.5 μm to 25 μm |
| Size Channels | Factory calibrated at 0.5, 1.0, 2.5, 5.0, 10.0 μm |
| Counting Efficiency | 50% @ 0.5μm; 100% for particles > 0.75 μm per JIS |
| Flow Rate | 1.0 CFM (28.3 LPM) |
| Concentration Limits | 1,500,000 particles/ft3 @ 10% coincidence (per ISO 21501-4), |
| 3,000,000 particles/ft3 @ 10% coincidence (as tested and validated)* | |
| Light Source | Long life laser diode |
| Zero Count | <1 count / 5 minutes (< 1 particles / 15ft3). No fault count subtraction. No appreciable drift. |
| Alarms | Channel alarms on Raw counts, concentrations or mass (alarms on environmental sensors optional) |
| Calibration | NIST traceable |
| Vacuum Requirements | External vacuum > 15” (38.1cm) of Hg |
| Airflow | Internally monitored |
| Number of Channels | 6 channels (up to 30 channels of simultaneous data) |
| Configuration/Download | USB mini-B |
| Alarm | Alarm LED ring |
| Communication Modes | MODBUS™ RTU or MODBUS™ ASCII over isolated RS-485, or MODBUS™ TCP over Wired, PoE, or WiFi |
| Standards | ISO 21501-4 and JIS B9921 |
| Instrument Calibration | Recommended minimum once per year |
| External Surface | Stainless steel |
| Dimensions (L x W x H) | 3.59 x 1.83 x 5.01 in (9.1 cm x 4.6 cm x 12.7 cm) including probes and connectors |
| Weight | 1.08 lb. (494 grams) |
| Accessories | Terminal block plug, User Manual, and Instrument Management Software (USB Key) |
| Optional Accessories | Power Supply, Remote Mounting Bracket, Stainless Steel Barbed Isoprobe (1.0 CFM/28.3 LPM), Purge Filter Assembly, USB-A to USB-Mini cable and Sample & Vacuum Tubing |
| Buffer Memory | 65,000 sample records (rotating buffer) including particle count data and environmental data |
| Sample Time | 1 second to 99 hours |
| Power | 9 - 24 VDC (< 3.5 watts) |
| Operating Conditions | 41-104ºF (5-40ºC) / 20% to 95% non-condensing |
| Storage Conditions | 32-122ºF (0-50ºC) / Up to 98% non-condensing |
| Warranty | 2 Year Limited Warranty (Extended and Lifetime Warranties available) |
| *Validated by independent analysis. See paper available at www.particlesplus.com/aac2022_paper | |
1- Validated by independent analysis see paper available at www.particlesplus.com/aac2022_paper
